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Development of an n-channel CCD, CCD-NeXT1, for Soft X-ray Imager onboard the NeXT satellite

机译：开发用于软X射线成像仪的n通道CCD CCD-NeXT1   在NeXT卫星上

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NeXT (New X-ray Telescope) is the next Japanese X-ray astronomical satellitemission after the Suzaku satellite. NeXT aims to perform wide band imagingspectroscopy. Due to the successful development of a multilayer coated mirror,called a supermirror, NeXT can focus X-rays in the energy range from 0.1 keV upto 80 keV. To cover this wide energy range, we are in the process of developinga hybrid X-ray camera, Wideband X-ray Imager (WXI) as a focal plane detector ofthe supermirror. The WXI consists of X-ray CCDs (SXI) and CdTe pixelizeddetectors (HXI), which cover the lower and higher X-ray energy bands of 0.1-80keV, respectively. The X-ray CCDs of the SXI are stacked above the CdTepixelized detectors of the HXI. The X-ray CCDs of the SXI detect soft X-raysbelow $\sim$ 10 keV and allow hard X-rays pass into the CdTe detectors of theHXI without loss. Thus, we have been developing a "back-supportless CCD" with athick depletion layer, a thinned silicon wafer, and a back-supportlessstructure. In this paper, we report the development and performances of anevaluation model of CCD for the SXI, "CCD-NeXT1". We successfully fabricatedtwo types of CCD-NeXT1, unthinned CCDs with 625-um thick wafer and 150-um thickthinned CCDs. By omitting the polishing process when making the thinned CCDs,we confirmed that the polishing process does not impact the X-ray performance.In addition, we did not find significant differences in the X-ray performancebetween the two types of CCDs. The energy resolution and readout noise are$\sim$ 140 eV (FWHM) at 5.9 keV and $\sim$5 electrons (RMS), respectively. Theestimated thickness of the depletion layer is $\sim$80 um. The performancesalmost satisfy the requirements of the baseline plan of the SXI.
机译：NeXT（新X射线望远镜）是继朱雀卫星之后的下一个日本X射线天文卫星发射任务。 NeXT旨在执行宽带成像光谱。由于成功开发了多层涂层反射镜（称为超级反射镜），NeXT可以将X射线聚焦在从0.1 keV到80 keV的能量范围内。为了覆盖这一宽泛的能量范围，我们正在开发混合X射线照相机，即宽带X射线成像仪（WXI），作为超镜的焦平面检测器。 WXI由X射线CCD（SXI）和CdTe像素化探测器（HXI）组成，分别覆盖了0.1-80keV的较低和较高的X射线能带。 SXI的X射线CCD堆叠在HXI的CdTepixelized检测器上方。 SXI的X射线CCD检测10 keV以下的软X射线，并使硬X射线无损失地进入HXI的CdTe检测器。因此，我们一直在开发一种具有厚耗尽层，薄硅片和无背支撑结构的“无背支撑CCD”。在本文中，我们报告了SXI CCD评估模型“ CCD-NeXT1”的开发和性能。我们成功地制造了两种类型的CCD-NeXT1，即625微米厚的晶圆和150微米厚的CCD。通过在制作薄型CCD时省略抛光过程，我们确认抛光过程不会影响X射线性能。此外，我们没有发现两种CCD之间的X射线性能有显着差异。在5.9 keV时，能量分辨率和读出噪声分别为140 eV（FWHM）和5 sim电子（RMS）。耗尽层的估计厚度为80um。性能几乎满足SXI基准计划的要求。

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